The redesigned Sym3 chamber environment makes possible process control to within a few atomic layers within chip, chip to chip, and wafer to wafer. The Centris platform delivers the excellent repeatability and high productivity demanded for high-volume manufacturing through system intelligence software that ensures exact process matching among the six etch chambers and between the two plasma clean chambers mounted on the platform.

Ensuring that this enhanced within-chip etch precision extends across the entire wafer, the Centris Sym3 system has been comprehensively redesigned for True Symmetry™ of power, gas delivery, and thermal characteristics necessary. In addition, improvements to Pulsync™ increase the effectiveness of synchronized plasma pulsing to minimize pattern loading. Users can enhance further performance with optional dual frequency bias that facilitates the etching of challenging high aspect ratio features.


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The genus Centris contains circa 250 species of large apid bees occurring in the Neotropical and Nearctic regions, from Kansas to Argentina. Most females of these bees possess adaptations for carrying floral oils rather than (or in addition to) pollen or nectar. They visit mainly plants of the family Malpighiaceae to collect oil, but also Plantaginaceae, Calceolariaceae, Krameriaceae and others. Recent studies have shown they are sister to the corbiculate bees, the most well-known and economically important group of bees [1]

Real estate brokers are subject to the Real Estate Brokerage Act and must comply with various measures to ensure your protection: they must meet the requirements of the Organisme d’autoréglementation du courtage immobilier du Québec (OACIQ), contribute to the Real Estate Indemnity Fund and hold professional liability insurance. They are responsible for the real estate transaction.
As semiconductor scaling has continued, increasingly rigorous requirements for precision and uniformity in chip fabrication have propelled the first comprehensive redesign of the silicon etch chamber in over a decade. The resulting Applied Centris Sym3 system delivers world-class cross-wafer uniformity with unprecedented within-chip feature control in critical etch applications for high-volume manufacturing at the 1x/10nm node and beyond.
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